Abstract:In this paper,the intrinsic,N-doped and Li-N co-doped ZnO thin film s were prepared on glass substrates by sol-gel spin-coating method.The effect s of the doping amount of Li on the crystal structure,surface morphology,transmi ttance of the films and luminescence were investigated.UV-Vis spectrophotomete r (UV-VIS),photoluminescence (PL),scanning electron microscope (SEM) and X-ray d iffr actometer (XRD) were used to characterize the samples.The results show that the structure and properties of the films are influenced by the doping amount of Li. With the increase of the doping amount of Li,the (002) diffraction peak intens ity increases,and the grain size increases first and then decreases.The intens ity of the UV emission peak and the transmittance of the film are enhanced first and then weakened.When the doping amount of Li is 6at%,the preferred orientat ion of the c axis of the thin film is the most obvious,the ultraviolet luminesc ence is the strongest and the transmittance is the largest.