量子阱红外探测器光谱特性研究
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(西安工业大学 光电工程学院,陕西 西安 710032)

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胡小英(1978-),女,陕西大荔人,博士,副教授,主要从 事微电子与固体电子学的研究.

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国防基础研究项目(A0920110019)、陕西省重点实验室开放基金(ZSKJ201301)和总装先 进制造(51318020303)资助项目 (西安工业大学 光电工程学院,陕西 西安 710032)


Research on spectral characteristics of quantum well infraredphotodetectors
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(School of Optoelectronic Engineering,Xi′an Technological University,Xi′an, 710032,China)

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    摘要:

    采用金属有机物化学气相沉积法(MOCVD)生长 制备30~50 μm×300 μm台面, 外电极压焊点面积80 μm×80 μm,内电极压 焊点面积20 μm×20 μm的GaAs/AlGaAs量子阱样 品数件,峰值响应波长为8.5 μm,从理论和实验两方面分析探讨了测试样品光谱特性。用傅 里叶光谱仪 分别对其进行50 K液氦温度下光谱响应测试,实验结果显示1#,2#样品峰值响应波长分别为8.38 μm,8.42 μm,与理论峰值响应波长8.5 μm分别相差0.12 μm,0.08 μm,误差约为1.4%。两样品峰值响应波长实验值与理论值误差均小于2.0%,实验结果表明金 属有机物化学气相沉积法技术可满足量子阱红外材料生长工艺要求,探测器电极压焊点面积 大小与位置对器件光谱特性影响甚微,该误差主要由测试系统引起的,利用高分辨透射扫描 电镜(HRTEM)对样品的微观结构进行剖析研究,说明虽然样品存在不同程度位错现象,但 由GaAs与AlGaAs晶格间不匹配带来的应力应变对器件宏观光谱响应特性影响不明显。

    Abstract:

    The GaAs/AlGaAs quantum well samples with 30~50period 300μm×300μm surface mesa,80μm×80μm external electrode pad area and 20μm×20μm inter nal electrode pad area were grown by metal organic chemical vapour deposition metho d (MOCVD).The peak response wavelength was 8.5μm.The spectral characteristics of the test samples were analyzed and discussed theoretically and experimentall y.Fourier spectrometer was used to test their spectral response at 50K liquid helium temperature respectively.The experimental results show that the peak re sponse wavelengths of 1# and 2# samples are 8.38μm and 8.42μm respectively, which are 0.12 μm and 0.08 μm different from the theoretical peak response wav elength of 8.5μm respectively,with an error of 1.4% and 0.9%.The error between the experimental value and theoretical value of the peak response wavelength of the two samples is less than 2.0%.The experimental results show that the metal organic chemical vapour deposition method technology can meet the requirements o f quantum well infrared material growth process.The size and location of the el ectrode pad area of the detector have little influence on the spectral character istics of the device.The error is mainly caused by the testing system.The micr ostructure of the samples is analyzed by using high-resolution transmission scan ning electron microscope (HRTEM),which shows that although the samples have dis location phenomena of different degrees,the stress and strain caused by the mis match between GaAs and AlGaAs lattices have no obvious influence on the macrosco pic spectral response characteristics of the device.

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胡小英,胡守波,刘卫国.量子阱红外探测器光谱特性研究[J].光电子激光,2020,31(3):237~242

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  • 收稿日期:2019-04-24
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  • 在线发布日期: 2020-05-29
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