Abstract:F-P etalons have been widely applied in optical communications,optical fiber sensing,lasers and other fields due to t heir simple structure,compactness and high accuracy.However,the optical characte ristics of the F-P etalon,especially the solid etalon,are susceptible to drift due to the changes i n ambient temperature.In practical applications,it is significant to make the F-P etalon better resistant to exte rnal temperature changes and improve its spectral stability.In this study,we proposed a high-precision temperature contr ol solution for solid-cavity F- P etalons.Firstly,we designed a low thermal resistance structure for the etalon based on the steady-state thermal analysis.Then,precise temperature control of the fiber-optic solid F-P etalon was achieved by combining the incremental PID temperature control algorithm and the corresponding control circ uit.The experimental results show that the temperature control accuracy reaches ± 0.004℃ under the environ mental temperature from 0℃ to 45℃,and the measured center wavelength shift of the F-P transmission spectru m is less than 0.3pm.