The WO3film has moderate optical band gap,refractive index and high work function and other semiconductor characteristics.In this paper,sputtering is used to prepare the WO3film to test its optical and electrical properties , and the appearance structure and crystal state of the film are observed using AF M and XRD.XPS and UPS characterize the stoichiometric composition and work funct ion of the film,and apply WO3film to AlGaInP light-emitting diode devices to i ncrease the ohmic contact characteristics with p-GaP and increase the carrier i n jection efficiency;the test results show that:The composite film formed by the thick WO3film dummy layer and ITO can effectively increase the electron inje ct ion efficiency,increase the light intensity of the AlGaInP light-emitting diod e by 4%,and reduce the forward voltage by 0.01V.