In this paper,an analysis model is established based on the beam propagation method (BPM) and the finite difference time domain method (FDTD).The effects of different structural parameters (etching depth,curvature radius,ridge width) of the curved ridge waveguide superluminescent light emitting diode (SLD) on the waveguide loss and the effects of different structural parameters (etching depth,ridge width,tilt angle,emission wavelength) of the inclined ridge waveguide on the mode reflectivity are simulated and analyzed.Calculations show that the etching depth and curvature radius of the curved ridge waveguide are important factors affecting the waveguide loss.The shallow etching depth makes the waveguide′s confinement effect on the optical field weaker,and the too small curvature radius will cause serious mode transmission leakage and greatly increase the loss.The larger the width of the ridge,the smaller the waveguide loss,which has less influence on the waveguide loss.The inclination angle of the end face of the ridge waveguide is an important factor for suppressing the mode reflectivity.With the increase of the ridge width,the mode reflectivity gradually decreases,and a singularity is formed at certain angles to reach a minimum value.The effect of the etching depth on the mode reflectivity is small, but with the increase of the etching depth, the angle at which the singularity occurs shifts to a small angle.Within a specific tilt angle range,the number of singularities increases gradually as the wavelength decreases.The research results can provide a reference for the design of SLD devices with superior performance.