一种新型的双模式红外传感器热电元件温度测量方法
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(武夷学院 农机智能控制与制造技术重点实验室,福建 武夷山 354300)

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陈 镔 (1984-),男,硕士,讲师,主要从事微机电传感器设计与智能系统方面的研究.

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国家自然科学基金项目(61903288)、福建省自然科学基金项目(2022J011191)、福建省科技厅引导性科研项目 (2021H0061)、南平市资源化学产业研究项目(N2020Z003)、福建省教育厅科技项目(JAT210457)和武夷学院服务产业研究专项(2021XJFWCY02)资助项目


A new dual-mode infrared sensor thermo-electric element temperature measurement method
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(Key Laboratory of Agriculture and Machinery Intelligent Control and Manufacturing Technology,Wuyi University, Wuyishan,Fujian 354300, China)

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    摘要:

    传统的红外温度测量传感器由热电元件和热敏电阻两种传感器构成,其中热电元件用于测量待测物体的目标温度,热敏电阻用于测量环境温度。本论文提出了一种新型的温度测量方法,通过使用单一的热电元件及其AD(analog-digital)模块和PMOS(positive channel metal oxide semiconductor)电路实现双模式的切换,在一个测量周期内实现红外传感器测温和环境温度补偿的作用。采用TSMC (Taiwan Semiconductor Manufacturing Company)0.35 μm CMOS(complementary metal oxide semiconductor) 工艺制造红外传感器,对红外传感器进行温度校准后按照双模式切换方法进行测试和实验,经过温度补偿后温度测量平均误差小于0.01 ℃,极大地提高了测量精度和环境温度补偿精度,减小动态温度测量误差,同时简化了红外温度传感器的设计制造过程,具有很好的实用价值。

    Abstract:

    Conventional infrared temperature measurement sensors consist of two types of sensors:a thermo-electric element for measuring the target temperature of the object to be measured and a thermistor for measuring the ambient temperature.This paper proposes a novel temperature measurement method that enables dual-mode switching by using a single thermo-electric element and its analog-digital (AD) module and positive channel metal oxide semiconductor (PMOS) circuit to achieve infrared sensor temperature measurement and ambient temperature compensation in one measurement cycle.The TSMC (Taiwan Semiconductor Manufacturing Company) 0.35 μm complementary metal oxide semiconductor (CMOS) process is used to manufacture the infrared sensor,and test and experiment are conducted according to the dual-mode swithing method after the temperature calibration of the infrared sensor is completed .The average error of temperature measurement is less than 0.01 ℃ after temperature compensation,which greatly improves the measurement accuracy and ambient temperature compensation accuracy,reduces the dynamic temperature measurement error,and simplifies the design and manufacturing process of the infrared temperature sensor.It has a very good practical value.

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陈镔.一种新型的双模式红外传感器热电元件温度测量方法[J].光电子激光,2023,34(10):1068~1074

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  • 收稿日期:2022-08-24
  • 最后修改日期:2022-10-26
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  • 在线发布日期: 2023-10-24
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